TAILIEUCHUNG - Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 10

Tham khảo tài liệu 'microsensors, mems and smart devices - gardner varadhan and awadelkarim part 10', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | MECHANICAL SENSORS 253 Load frequency rads sec Hammock flexure Anchor to substrate Shuttle mass Figure Dynamic response of an ideal microflexural structure to a sinusoidal driving load Figure Three common microflexural designs a hammock b folded and c crab-leg. Adapted from Gardner 1994 254 MICROSENSORS Table Some mechanical characteristics of three different microflexures Parameter Hammock Folded Crab-leg Bending deflection y Axial and bending Bending stress Bending stress stress Spring constant ky Nonlinear in y Constant and Constant and independent of y independent of y Axial deflection X Axial stress only Axial and bending Axial and bending stress stress Spring constant kx Stiff 4EmA l Quite stiff Stiff Table Some important mechanical parameters and material properties that define the dynamic deflection of microflexures Parameters properties Poinừdistributed force torque stress pressure Width breadth thickness length Young s modulus yield sưength buckling strength Poisson s ratio density viscosity friction Spring constant strain mass moment of inertia natural frequency damping coefficient Lateral vertical deflection angular deflection resonance bandwidth Nature Load applied measurand Size of structure Material properties Calculable parameters Response Table provides the characteristic properties of these flexures in which their dynamical response is much more complicated than that of a simple end mass and is often determined using computational methods for example a finite-element or finite-difference analysis. When designing dynamic structures we need to consider some additional parameters which are listed in Table . Mechanical Microstructures The two most important questions that now need to be asked by the designer are as follows. Fừst if these mechanical structures can be made on the micron scale and second if they still follow classical theory for example the linear theory of elasticity. We know that microbeams microbridges .

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