TAILIEUCHUNG - Asghar et al. Nanoscale Research Letters 2011, 6:372

Asghar et al. Nanoscale Research Letters 2011, 6:372 NANO EXPRESS Open Access Shrinking of Solid-state Nanopores by Direct Thermal Heating Waseem Asghar1,2, Azhar Ilyas1,2, Joseph Anthony Billo1,2 and Samir Muzaffar Iqbal1,2,3* Abstract Solid-state nanopores have emerged as useful single-molecule sensors for DNA and proteins. A novel and simple technique for solid-state nanopore fabrication is reported here. The process involves direct thermal heating of 100 to 300 nm nanopores, made by focused ion beam (FIB) milling in free-standing membranes. Direct heating results in shrinking of the silicon dioxide nanopores. The free-standing silicon dioxide membrane is softened and adatoms diffuse to a lower surface free energy | Asghar et al. Nanoscale Research Letters 2011 6 372 http content 6 1 372 o Nanoscale Research Letters a SpringerOpen Journal NANO EXPRESS Open Access Shrinking of Solid-state Nanopores by Direct Thermal Heating Waseem Asghar1 2 Azhar Ilyas1 2 Joseph Anthony Billo1 2 and Samir Muzaffar Iqbal1 2 3 Abstract Solid-state nanopores have emerged as useful single-molecule sensors for DNA and proteins. A novel and simple technique for solid-state nanopore fabrication is reported here. The process involves direct thermal heating of 100 to 300 nm nanopores made by focused ion beam FIB milling in free-standing membranes. Direct heating results in shrinking of the silicon dioxide nanopores. The free-standing silicon dioxide membrane is softened and adatoms diffuse to a lower surface free energy. The model predicts the dynamics of the shrinking process as validated by experiments. The method described herein can process many samples at one time. The inbuilt stress in the oxide film is also reduced due to annealing. The surface composition of the pore walls remains the same during the shrinking process. The linear shrinkage rate gives a reproducible way to control the diameter of a pore with nanometer precision. Background The use of a-hemolysin protein nanopores inspired the fabrication of solid-state nanopores. Solid-state nanopores have emerged as novel biosensors for single molecule analysis of DNA proteins etc. 1-7 . Solid-state nanopores are more stable than protein nanopores under various experimental conditions like pH salinity and temperature 8-11 . When a single bio-molecule electrophoretically passes through a nanopore it gives significant current blockage pulses. The diameter of the nanopore should be almost at the same scale as the size of the translocating species. The pores fabricated with conventional processes result into initial diameters larger than the size of species of interest 12-16 . The nanopore diameter is then reduced using .

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