TAILIEUCHUNG - MEMS Advanced Materials and Fabrication Methods - Nat. Aca. Press Part 3

Tham khảo tài liệu 'mems advanced materials and fabrication methods - nat. aca. press part 3', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | Microelectromechanical Systems Advanced Materials and Fabrication Methods 1997 http openbook 0309059801 html copyright 1997 2000 The National Academy of Sciences all rights reserved Executive Summary As the twenty-first century approaches the capacity to shrink electronic devices while multiplying their capabilities has profoundly changed both technology and society. Beginning in 1948 the vacuum tube gave way to the transistor which was followed by a series of major strides leading to integrated circuits ICs which led to on-chip electronic systems such as large-scale memories and microprocessors. Present silicon very-large-scale-integrated VLSI chip technology seems destined to continue developing for at least another 20 years based on smaller and smaller electronic devices that can operate faster and do more. In the late 1980s the design and manufacturing tool set developed for VLSI was adapted for use in a field called microelectromechanical systems MEMS . These systems interface with both electronic and nonelectronic signals and interact with the nonelectrical physical world as well as the electronic world by merging signal processing with sensing and or actuation. Instead of handling only electrical signals MEMS also bring into play mechanical elements some with moving parts making possible systems such as miniature fluid-pressure and flow sensors accelerometers gyroscopes and micro-optical devices. MEMS are designed using computer-aided design CAD techniques based on VLSI and mechanical CAD systems and are typically batch-fabricated using VLSI-based fabrication tools. Like ICs MEMS are progressing toward smaller sizes higher speeds and greater functionality. MEMS already have a track record of commercial success that provides a compelling case for further development . pressure sensing acceleration sensing and ink-jet printing . Like any developing field however commercial successes in the MEMS field coexist with products still under .

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