TAILIEUCHUNG - Handbook of algorithms for physical design automation part 77

Handbook of Algorithms for Physical Design Automation part 77 provides a detailed overview of VLSI physical design automation, emphasizing state-of-the-art techniques, trends and improvements that have emerged during the previous decade. After a brief introduction to the modern physical design problem, basic algorithmic techniques, and partitioning, the book discusses significant advances in floorplanning representations and describes recent formulations of the floorplanning problem. The text also addresses issues of placement, net layout and optimization, routing multiple signal nets, manufacturability, physical synthesis, special nets, and designing for specialized technologies. It includes a personal perspective from Ralph Otten as he looks back on. | 742 Handbook of Algorithms for Physical Design Automation this model takes the topography of the wafer into account and adjusts the polishing rate accordingly it does not consider the bending of the polishing pad. Neither does it consider the fluid mechanics. The model is purely empirical and does not depend on the pressure. Because of these shortcomings it has limited use in modeling the entire CMP process. Warnock et al. 71 propose another model that quantitatively analyzes the absolute and the relative polish rate for different sizes and pattern factors. This model defines the dependence of the polish rate on the wafer shape. In particular it takes into account all possible geometrical cases which makes it applicable to modeling of the entire CMP process. Finally a model proposed by Yu et al. 74 considers the dependence of the RR on the asperity of the polishing pad. The surface height variation for a 200 qm x 200 qm pad is reported to be 100 qm. In addition the model divides the Preston s constant K into three different parts 1 a constant only dependent on the pad roughness and its elasticity 2 a factor determined by the surface chemistry and 3 a constant that is related to the contact area. However it is not clear how these asperities affect the global quality of planarization. A global planarization quantity of 200 A over a distance of cm is reported in Ref. 64 . This variation is much less than the reported polishing pad height variation 100 qm making it unclear how the approach fits into a general CMP simulation. Oxide CMP Modeling Pattern density is a significant contributor to oxide CMP process quality. The Preston equation shows that the material RR is a linear function of the pressure which is affected by the pattern density at the interface between polishing pad and wafer. However pattern density calculation is not trivial. In fact the effective density at a particular point on the die depends on the size of the neighboring area over which .

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