TAILIEUCHUNG - Báo cáo " Photo-catalytic transparent heat mirror film TiO2/TiN/TiO2 "

Transparent heat mirror thin films have high transmittance in the visible range of wavelength and high reflectance in the infrared range of wavelength. TiO2/TiN/TiO2 films prepared via a reactive magnetron sputtering method on Corning glass and Alkali glass substrates, serve as transparent heat mirrors. The outer TiO2 layer has both the photo-catalytic and anti-reflective properties. The experiment data showed that the film thickness required for photocatalytic properties exceeds 350nm. | VNU Journal of Science Mathematics - Physics 24 2008 231-237 Photo-catalytic transparent heat mirror film TiO2 TiN TiO2 Le Tran Nguyen Huu Chi Tran Tuan Department of Application Physics University of Natural Sciences Vietnam University HCM City 227Nguyen Van Cu District 5 Ward 4 Ho Chi Minh City Received 30 August 2008 received in revised form 10 October 2008 Abstract. Transparent heat mirror thin films have high transmittance in the visible range of wavelength and high reflectance in the infrared range of wavelength. TiO2 TiN TiO2 films prepared via a reactive magnetron sputtering method on Corning glass and Alkali glass substrates serve as transparent heat mirrors. The outer TiO2 layer has both the photo-catalytic and anti-reflective properties. The experiment data showed that the film thickness required for photo-catalytic properties exceeds 350nm. In this report we found the relationship between the thicknesses of the films via calculation and experiment. Prepared films have both catalytic and transparent heat mirror properties with an inner TiO2 layer thickness of 40 - 300nm a sandwich TiN layer thickness of 22 - 35nm and an outer TiO2 layer thickness exceeding 350nm. Keywords Photo-catalytic heat mirror transmittance. 1. Introduction The optical properties of transparent heat mirrors 1-3 consist of high transmittance in the visible spectrum wavelength 380 X 760nm and high reflectance in the infrared spectrum Wavelength X 760nm . Transparent heat mirror films are obtainable via three methods 4 A method using multi-layer dielectric metal or dielectric metal dielectric films. A method using metal thin films with high infrared reflectance such as silver gold copper etc. a A method using semiconductor materials which exhibit high infrared reflectance such as ZnO SiN PbO Bi2O3 SnO2 In2O3 etc or doped semiconductors such as SnO2 F SnO2 Sb AZO GZO ITO etc. However metalic films are not stable in terms of heat mechanics and chemistry. The semiconductor films show

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