TAILIEUCHUNG - Thermoelastic damping depending on vibration modes of nano beam resonator
The obtainable quality factor for a nano beam resonator is limited due to internal damping such as thermoelastic damping. Therefore, understanding how internal damping varies with the respective resonant modes is very important to design a high performance nanoresonator. In this research, we investigate thermoelastic damping depending on vibration modes of nano beam resonators using finite element method. The study results show that the quality factor of a nanoresonator is lower than at high order modes. The silicon nano beam resonator with the quality factor larger than one million can be achieved by optimizing the dimensions of the resonant beam. | Communications in Physics, Vol. 25, No. 4 (2015), pp. 317-325 DOI: THERMOELASTIC DAMPING DEPENDING ON VIBRATION MODES OF NANO BEAM RESONATOR CHU MANH HOANG International Training Institute for Materials Science, Hanoi University of Science and Technology, No. 1, Dai Co Viet, Hai Ba Trung, Hanoi, Vietnam Received 4 September 2015 Accepted for publication 15 December 2015 E-mail: hoangcm@ Abstract. The obtainable quality factor for a nano beam resonator is limited due to internal damping such as thermoelastic damping. Therefore, understanding how internal damping varies with the respective resonant modes is very important to design a high performance nanoresonator. In this research, we investigate thermoelastic damping depending on vibration modes of nano beam resonators using finite element method. The study results show that the quality factor of a nanoresonator is lower than at high order modes. The silicon nano beam resonator with the quality factor larger than one million can be achieved by optimizing the dimensions of the resonant beam. Keywords: Nano beam resonator, internal damping, operation mode, thermoelastic damping, FEM I. INTRODUCTION Micro-and nano-mechanical beam resonators are promising for applications in timing, sensing, and physical measurement [1-5]. The advantages of micro- and nano-resonators over the macro-size ones are high operation frequency, high sensitivity in physical measurements, and low energy consumption. The requirement of a resonator for such applications is high quality factor. A resonator with high Q supplies high sensitivity, low noise, and low energy consumption. Besides high Q, the resonators also requires to operate at high frequency, for example, to enhance the time resolution of measurement in atomic force microscopy and real-time measurements [6]. In order to increase the resonant frequency, the size of the resonator needs to be decreased. However, this leads to high surface to
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