TAILIEUCHUNG - Micromanufacturing and Nanotechnology

Sophisticated miniaturised components and systems may indeed change all kinds of products and equipment in the most dramatic way. Methodology and design of miniaturisation represent a broad research topic with applications in fundamental physics, chemistry, martial science, computing methods, ultra-precision engineering, fabrication technology, micromachining, and many others based on the principles, characterization, modeling, simulation, sophistication, flexibility of state-of-the-art technology. Micromanufacturing and Nanotechnology (MaN), an advanced product and equipment design concept has emerged and caters to the need for miniaturisation. Technological research in the field of MaN is now expanding; its design phases appear to be highly complex and involve multiphysics and interdisciplinary approaches | N. P. Mahalik Micromanufacturing and Nanotechnology N. P. Mahalik Micromanufacturing and Nanotechnology With 300 Figures Dr. Nitaigour Premchand Mahalik Universtiy College of Engineering Burla Biju Patnaik University of Technology Rourkela Sambalpur Orisa Pin 768 018 India Presently at Gwangju Institute of Science and Technology Gwangju 500 712 Republic of South Korea nmahalik@ Library of Congress Control Number 2005929276 ISBN-10 3-540-25377-7 Springer Berlin Heidelberg New York ISBN-13 978-3-540-25377-8 Springer Berlin Heidelberg New York This work is subject to copyright. All rights are reserved whether the whole or part of the material is concerned specifically the rights of translation reprinting reuse of illustrations recitation broadcasting reproduction on microfilm or in other ways and storage in data banks. Duplication of this publication or parts thereof is permitted only under the provisions of the German Copyright Law of September 9 1965 in its current version and permission for use must always be obtained from Springer. Violations are liable to prosecution under German Copyright Law. Springer is a part of Springer Science Business Media Springer-Verlag Berlin Heidelberg 2006 Printed in Germany The use of general descriptive names registered names trademarks etc. in this publication does not imply even in the absence of a specific statement that such names are exempt from the relevant protective laws and regulations and therefore free for general use. Typesetting Digital data supplied by author Final processing by PTP-Berlin Protago-TEX-Production GmbH Germany Cover-Design medionet AG Berlin Printed on acid-free paper 62 3141 Yu - 5 4 3 2 1

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• Surface Micromachining
• Document Security
• Wafer Bonding Process