TAILIEUCHUNG - Microfabrication in Biology and Medicine

To the lay person, printing an electro mechanical device on the same machine, at the same time, may not sound that revolutionary. However, when future 3D printers are able to manufacture very sophisticated devices that contain fully formed electronic circuitry, batteries, sensors inside some sort of mechanical “body,” we will witness the production of fully formed robots that will not require further assembly. The ability of a 3D printer to print all of a robot’s vital parts in one fell swoop, directly from raw materials, would not only save time and effort on assembly. Printing previously incompatible materials. | Annu. Rev. Biomed. Eng. 1999. 01 401-425 Copyright 1999 by Annual Reviews. All rights reserved Microfabrication in Biology and Medicine Joel Voldman1 2 Martha L. Gray1 2 3 and Martin A. Schmidt1 2 Department of Electrical Engineering and Computer Science 2Microsystems Technology Laboratories and 3Division of Health Sciences and Technology Massachusetts Institute of Technology Cambridge Massachusetts 02139 e-mail voldman@ mgray@ schmidt@ Key Words micromachining microelectromechanical systems cell biology molecular biology MEMS B Abstract Microfabrication uses integrated-circuit manufacturing technology supplemented by its own processes to create objects with dimensions in the range of micrometers to millimeters. These objects can have miniature moving parts stationary structures or both. Microfabrication has been used for many applications in biology and medicine. These applications fall into four domains tools for molecular biology and biochemistry tools for cell biology medical devices and biosensors. Microfabricated device structures may provide significantly enhanced function with respect to a conventional device. Sometimes microfabrication can enable devices with novel capabilities. These enhancing and enabling qualities are conferred when microfabrication is used appropriately to address the right types of problems. Herein we describe microfabrication technology and its application to biology and medicine. We detail several classes of advantages conferred by microfabrication and how these advantages have been used to date. CONTENTS Introduction. 402 Microfabrication Technology. 404 Overview. 404 Substrate Materials. 404 Photolithography. 406 Thin-Film Growth Deposition. 407 Etching. 408 Bonding. 409 Sample Process Flow. 410 Applications Overview. 411 Tools for Molecular Biology and Biochemistry. 413 Tools for Cell Biology. 413 1523-9829 99 0820-0401 401 402 VOLDMAN GRAY SCHMIDT Tools for Medicine. 413 Biosensors. 414 .

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