TAILIEUCHUNG - Design and Simulation of Micromachined Gyroscope Based on Finite Element Method
This paper presents a design, simulation and analysis of a vibratory micromachining gyroscope. The gyroscope structure is based on the driving and sensing proof-mass configuration. The gyroscope dimensions are 1644 µm wide, 1754 µm long, 30µm thickness. The suspended spring consists of two silicon cantilevers of driving-mode and sensing-mode stiffness are 400 N/m and 165 N/m, respectively. | VNU Journal of Science: Mathematics – Physics, Vol. 33, No. 3 (2017) 77-88 Design and Simulation of Micromachined Gyroscope Based on Finite Element Method Nguyen Van Thang1,*, Tran Duc Tan2, Chu Duc Trinh2 1 Broadcasting College I - Voice of Vietnam, Phu Ly, Ha Nam, Vietnam 2 VNU University of Engineering and Technology, Hanoi, Vietnam Received 22 December 2016 Revised 14 March 2017; Accepted 22 March 2017 Abstract: This paper presents a design, simulation and analysis of a vibratory micromachining gyroscope. The gyroscope structure is based on the driving and sensing proof-mass configuration. The gyroscope dimensions are 1644 µm wide, 1754 µm long, 30µm thickness. The suspended spring consists of two silicon cantilevers of driving-mode and sensing-mode stiffness are 400 N/m and 165 N/m, respectively. Mass of driving proof-mass (including of ×10E-11 kg sensing proof-mass) is ×10E-7 kg. The simulated resonance frequency is 13324 Hz. The output signals are calculated based on the simulated vibration results. The structure is investigated with several input angular signals. The sensitivity of proposed structure is 100 mV/rad/s when ω changes from 0 to rad/s. Keywords: Gyroscope, Tuning Fork Gyroscope, Comsol Multiphysics and Gyroscope. 1. Introduction In recent years, gyroscopes in general and micromachined gyroscopes in particular have been very popularly used [1], [2]. A specific analysis of the cause of vibration-induced error is implemented to understand the vibration effects on ideal tuning fork gyroscopes (TFGs) [3]. This research presents the major causes of error that arise from: capacitive nonlinearity at the sense electrode, asymmetric electrostatic forces along the drive direction at the drive electrodes and asymmetric electrostatic forces along sense direction at the drive electrodes. In some applications, operation and performance of gyroscopes are affected by a lot of changing environmental conditions such as temperature, .
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