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Marti, O. Ò"AFM Instrumentation and Tips"Ó Handbook of Micro/Nanotribology. Ed. Bharat Bhushan Boca Raton: CRC Press LLC, 1999 © 1999 by CRC Press LLC AFM Instrumentation and Tips Othmar Marti Force Detection The Mechanics of Cantilevers Compliance and Resonances of Lumped Mass Systems • Cantilevers • Tips and Cantilevers • Materials and Geometry • Outline of Fabrication 2 Optical Detection Systems Interferometer • Sensitivity Optical Lever Implementations • Sensitivity Piezoresistive Detection Implementations • Sensitivity Capacitive Detection Sensitivity • Implementations Combinations for Three-Dimensional Force Measurements Scanning and Control Systems Piezotubes • Piezoeffect • Scan Range • Nonlinearities, Creep • Linearization Strategies • Alternative Scanning Systems • Control Systems AFMs Special Design Considerations. | Marti O. AFM Instrumentation and Tips Handbook of Micro Nanotribology. Ed. Bharat Bhushan Boca Raton CRC Press LLC 1999 1999 by CRC Press LLC 2 AFM Instrumentation and Tips Othmar Marti Force Detection The Mechanics of Cantilevers Compliance and Resonances of Lumped Mass Systems Cantilevers Tips and Cantilevers Materials and Geometry Outline of Fabrication Optical Detection Systems Interferometer Sensitivity Optical Lever Implementations Sensitivity Piezoresistive Detection Implementations Sensitivity Capacitive Detection Sensitivity Implementations Combinations for Three-Dimensional Force Measurements Scanning and Control Systems Piezotubes Piezoeffect Scan Range Nonlinearities Creep Linearization Strategies Alternative Scanning Systems Control Systems AFMs Special Design Considerations Classical Setup StandAlone Setup Data Acquisition Typical Setups Data Representation The Two-Dimensional Histogram Method Some Common Image-Processing Methods Acknowledgments References Introduction The performance of AFMs and the quality of AFM images greatly depend on the instruments available and the sensors tips in use. To utilize a microscope to its fullest it is necessary to know how it works and where its strong points and its weaknesses are. This chapter describes the instrumentation of force detection of cantilevers and of the instruments themselves. 1999 by CRC Press LLC Force Detection Atomic force microscopy AFM Binnig et al. 1986 was an early offspring of scanning tunneling microscopy STM . The force between a tip and the sample was used to image the surface topography. The force between the tip and the sample also called the tracking force was lowered by several orders of magnitude compared with the profilometer Jones 1970 . The contact area between the tip and the sample was reduced considerably. The force resolution was similar to that achieved in the surface force apparatus Israelachvili 1985 . Soon thereafter atomic .

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