TAILIEUCHUNG - MEMS-based Circuits and Systems for Wireless Communication

Over many years, RF-MEMS have been a hot topic in research at the technology and device level. In particular, various kinds of mechanical Si-MEMS resonators and piezoelectric BAW (bulk acoustic wave) resonators have been developed. The BAW technology has made its way to commercial products for passive RF filters, in particular for duplexers in RF transceiver front ends for cellular communications. Beyond their use in filters, micromachined resonators can also be used in conjunction with active devices in innovative circuits and architectures. Possible applications are active tunable RF front-end filters, frequency synthesizers for LO generation, or temperature-compensated MEMS resonators for frequency/time reference potentially replacing the long-time used quartz crystal | Christian C. Enz Andreas Kaiser Editors MEMS-based Circuits and Systems for Wireless Communication 1 Springer Editors Christian C. Enz CSEM SA CH-2002 Neuchatel Switzerland Andreas Kaiser IEMN Departement ISEN 59046 Lille France ISSN 1558-9412 ISBN 978-1-4419-8797-6 ISBN 978-1-4419-8798-3 eBook DOI 978-1-4419-8798-3 Springer New York Heidelberg Dordrecht London Library of Congress Control Number 2012943350 Springer Science Business Media New York 2013 This work is subject to copyright. All rights are reserved by the Publisher whether the whole or part of the material is concerned specifically the rights of translation reprinting reuse of illustrations recitation broadcasting reproduction on microfilms or in any other physical way and transmission or information storage and retrieval electronic adaptation computer software or by similar or dissimilar methodology now known or hereafter developed. Exempted from this legal reservation are brief excerpts in connection with reviews or scholarly analysis or material supplied specifically for the purpose of being entered and executed on a computer system for exclusive use by the purchaser of the work. Duplication of this publication or parts thereof is permitted only under the provisions of the Copyright Law of the Publisher s location in its current version and permission for use must always be obtained from Springer. Permissions for use may be obtained through RightsLink at the Copyright Clearance Center. Violations are liable to prosecution under the respective Copyright Law. The use of general descriptive names registered names trademarks service marks etc. in this publication does not imply even in the absence of a specific statement that such names are exempt from the relevant protective laws and regulations and therefore free for general use. While the advice and information in this book are believed to be true and accurate at the date of publication neither the .

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