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Tuyển tập các báo cáo nghiên cứu về hóa học được đăng trên tạp chí hóa hoc quốc tế đề tài : SiC formation for solar cell passivation layer using RF magnetron co-sputtering system | Nanoscale Research Letters SpringerOpen0 This Provisional PDF corresponds to the article as it appeared upon acceptance. Fully formatted PDF and full text HTML versions will be made available soon. SiC formation for solar cell passivation layer using RF magnetron co-sputtering system Nanoscale Research Letters 2012 7 22 doi 10.1186 1556-276X-7-22 Yeun-Ho Joung yhjoung@hanbat.ac.kr Hyun Il Kang hikang@hanbat.ac.kr Jung Hyun Kim jhkim@hanbat.ac.kr Hae-Seok Lee lhseok@shinsung.co.kr Jaehyung Lee jaehyeong@skku.edu Won Seok Choi wschoi@hanbat.ac.kr ISSN 1556-276X Article type Nano Express Submission date 19 September 2011 Acceptance date 5 January 2012 Publication date 5 January 2012 Article URL http www.nanoscalereslett.com content 7 1 22 This peer-reviewed article was published immediately upon acceptance. It can be downloaded printed and distributed freely for any purposes see copyright notice below . Articles in Nanoscale Research Letters are listed in PubMed and archived at PubMed Central. For information about publishing your research in Nanoscale Research Letters go to http www.nanoscalereslett.com authors instructions For information about other SpringerOpen publications go to http www.springeropen.com 2012 Joung etal. licensee Springer. This is an open access article distributed under the terms of the Creative Commons Attribution License http creativecommons.org licenses by 2.0 which permits unrestricted use distribution and reproduction in any medium provided the original work is properly cited. SiC formation for a solar cell passivation layer using an RF magnetron co- sputtering system X TT T 1 TT r. 1 T r.- 2 TT r . T 3 T T 4 Yeun-Ho Joung Hyun II Kang Jung Hyun Kim Hae-Seok Lee Jaehyung Lee and Won Seok Choi 1 1School of Electrical Engineering Hanbat National University Daejeon 305-719 Republic of Korea 2Department of Applied Materials Engineering Hanbat National University Daejeon 305-719 Republic of Korea 3Solar Cell R D Center Shinsung Solar Energy Co.
