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Bài viết này trình bày nghiên cứu về hình thái học, cơ khí và các tài sản tribological của hydro kim cương như carbon (DLC) lớp phủ gửi qua magnetron thổi theo điện áp thiên vị khác nhau. Kính hiển vi lực nguyên tử (AFM), kính hiển vi điện tử truyền qua (TEM), quang phổ Raman, thụt đầu dòng nano và bóng-ondisc tribotest được sử dụng để mô tả các lớp phủ gửi. | Science Technology Development Vol 11 No.10 - 2008 DIAMOND - LIKE CARBON COATINGS FOR TRIBOLOGICAL APPLICATIONS Bui Xuan Lam University of Groningen the Netherlands Manuscript Received on November 28th 2007 Manuscript Revised June 27th 2008 ABSTRACT This paper presents studies on the morphology mechanical and tribological properties of hydrogen-free diamond-like carbon DLC coatings deposited via magnetron sputtering under different bias voltages. Atomic force microscope AFM transmission electron microscope TEM Raman spectroscopy nano-indentation and ball-on-disc tribotest were employed to characterize the deposited coatings. Diamond-like carbon coatings had very smooth surface with the roughness Ra of less than 3.5 nm for 1.2 ụm -thick coatings on Si wafer . Under high bias voltage superhard coatings with hardness of more than 30 GPa were obtained.The self-lubrication mechanism of diamond-like carbon combined with smooth surface resulted in very low coefficients friction of less than 0.15. Magnetron sputtered diamond-like carbon show a big potential for tribological applications especially under dry or poorly lubricated conditions. Keywords magnetron sputtering diamond-like carbon bias voltage hardness roughness tribology graphitization 1. INTRODUCTION Carbon is one of the commonest elements throughout the Universe. The electronic configuration of carbon is written as 1s22s22p2. In the nature carbon is found as diamond graphite and amorphous carbon. The name diamond-like carbon was first coined by Sol Aisenberg in 1971 to describe the hard carbon films that he prepared by direct deposition from low energy carbon ion beams 1 . Now diamond-like carbon DLC is the name commonly accepted for hard carbon coatings which have similar mechanical optical electrical and chemical properties to natural diamond but which do not have a dominant crystalline lattice structure. They are amorphous and consist of a mixture of sp3 diamond and sp2 graphite structures with sp2 bonded .
