Đang chuẩn bị nút TẢI XUỐNG, xin hãy chờ
Tải xuống
Tham khảo tài liệu 'coatings technology handbook 2010 part 6', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | 31-10 Coatings Technology Handbook Third Edition Substrate Field Lines a Cathode 1 S N N S N S S N Cathode 2 N S S N S N Ns b FIGURE 31.6 The mirrored and closed-field magnet configurations a mirrored where like poles face each other b closed field where opposite poles face each other. perimeter pole piece resulting in an additional axial field. In the second case the perimeter pole has been made stronger resulting in an additional cylindrical component to the field. In the third case Figure 31.5c an electromagnet has been added externally to the magnetron to provide a simple axial field. The unbalanced magnetrons are characterized by the addition of magnetic field lines that are no longer constrained between the central and perimeter pole pieces of the magnetron. Additional field lines leave the region of the magnetron and intersect the sample region. Electron motion along these field lines is unconstrained by the E X B trapping effect near the cathode and is actually enhanced due to the drift of electrons from high-strength magnetic field regions to lower strength regions. As a result electrons can leak away from the near cathode region. This sets up a very weak potential that tends to draw ions from the cathode region out to the near-sample region. It is these ions that can then be used to form the basis of a sample bias necessary for the enhancement of the TiN reaction. Titanium nitride has extensive applications in the commercial world for hard and decorative coatings. The unbalanced magnetron approach has been used successfully on a manufacturing scale for the production of TiN and related compounds. To cover large numbers of parts or else to cover large parts with unusual shapes systems are often configured with multiple magnetrons within a single chamber.24 A simple example of this is shown in Figure 31.6 where two unbalanced magnetrons have been configured across from each other with the sample placed in the middle. The magnetrons can be configured to be .