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Tungsten oxide film was deposited on ITO-coated glass by using RF magnetron sputtering method from WO3 ceramic target. Thin film preparation – process took place in Ar + O2 plasma. The dependence of tungsten oxide film structure on experiment conditions was investigated by X-ray diffraction (XRD) Raman spectroscopy. In this paper, we considered that the thickness of ITO layers about 150nm to 350nm clearly effects on the Raman and XRD spectrograms of WO3 films. | VNU Journal of Science Mathematics - Physics 25 2009 47-55 Survey of WO3 thin film structure built on ito glass substrates by the Raman and xrd spectroscopies Le Van Ngoc1 Tran Cao Vinh1 Le Quang Toai1 Nguyen Duc Thinh1 Huynh Thanh Dat2 Tran Tuan1 Duong Ai Phuong1 University of Science Vietnam National University - Ho Chi Minh city 227 Nguyen Van Cu Vietnam 2Vietnam National University - Ho Chi Minh city Linh Trung Thu Duc Vietnam Received 17 January 2009 received in revised form 12 March 2009 Abstract. Tungsten oxide film was deposited on ITO-coated glass by using RF magnetron sputtering method from WO3 ceramic target. Thin film preparation - process took place in Ar O2 plasma. The dependence of tungsten oxide film structure on experiment conditions was investigated by X-ray diffraction XRD Raman spectroscopy. In this paper we considered that the thickness of ITO layers about 150nm to 350nm clearly effects on the Raman and XRD spectrograms of WO3 films. Keywords WO3 structure WO3 ITO glass Raman spectroscopy. 1. Introduction WO3 thin films have been studied for along time due to their unique properties and their potential applications into. And the most promising application of WO3 thin films is electrochromic devices based on electrochromism in which optical properties WO3 alter reversibly under electrical bias applied 1-3 . Moreover recently WO3 thin films have been studied to fabricate toxic gas sensors such as NOx H2S NH3 CO and some popular others like H2 O2 O3 CỈ2 SO2 CH4 4-7 . Both electrochromism and gaseous sensitization are based on the reversible diffusion of particles along the vacant tunnels of WO3 perovskite structure. Thus having large and oriented vacant tunnels will be a great advantage. Furthermore many methods are used to prepare WO3 thin films such as sputtering 8-11 sol -gel 12 spray pyrolysis 13-14 anodizing technique 15 thermal evaporation 15-21 . And different preparation methods have respective advantages in film quality and application. .
