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The hole closing reported in this letter is certainly not caused by deposition of carbon-rich material by the electron beam, a common phenomenon in electron microscopy. The observation that large pores expand is in direct contradiction with potential contamination growth. Secondly, electron-energy-loss spectra (EELS) locally obtained on the material that filled a nanopore clearly show the presence of silicon and oxygen,but the absence of any carbon (detection limit was less than 2%). The power of our technique lies in the possibility of fine-tuning the diameter of nanopores with unprecedented precision. By lowering the beam intensity or blanking it, the shrinking process can be stopped within seconds when the desired diameter.
