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Cathodoluminescence (CL) is a non-destructive technique to characterize optical and electronic properties of nanostructures in many kinds of materials. Major subject is to investigate basic parameters in semiconductors, impurities in oxides and phase determination of minerals. CL is similar to photoluminescence (PL) technique, but the excitation by high energy electrons can produce all the transition to the higher energy excitation states and induce light emission in the wide energy range concerned with versatile types of electronic transitions in materials | CATHODOLUMINESCENCE Edited by Naoki Yamamoto INTECHOPEN.COM Cathodoluminescence Edited by Naoki Yamamoto Published by InTech Janeza Trdine 9 51000 Rijeka Croatia Copyright 2012 InTech All chapters are Open Access distributed under the Creative Commons Attribution 3.0 license which allows users to download copy and build upon published articles even for commercial purposes as long as the author and publisher are properly credited which ensures maximum dissemination and a wider impact of our publications. After this work has been published by InTech authors have the right to republish it in whole or part in any publication of which they are the author and to make other personal use of the work. Any republication referencing or personal use of the work must explicitly identify the original source. As for readers this license allows users to download copy and build upon published chapters even for commercial purposes as long as the author and publisher are properly credited which ensures maximum dissemination and a wider impact of our publications. Notice Statements and opinions expressed in the chapters are these of the individual contributors and not necessarily those of the editors or publisher. No responsibility is accepted for the accuracy of information contained in the published chapters. The publisher assumes no responsibility for any damage or injury to persons or property arising out of the use of any materials instructions methods or ideas contained in the book. Publishing Process Manager Danijela Duric Technical Editor Teodora Smiljanic Cover Designer InTech Design Team First published March 2012 Printed in Croatia A free online edition of this book is available at www.intechopen.com Additional hard copies can be obtained from orders@intechopen.com Cathodoluminescence Edited by Naoki Yamamoto p. cm. ISBN 978-953-51-0362-2 INTECH open science I open minds free online editions of InTech Books and Journals can be found at .