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The structural, morphological and optical properties of CBD deposited CdS thin films have been studied by varying the processing parameters and the Cd/S ratio of the starting precursors in order to better understand the growth conditions. The films were characterized by Xray diffraction, SEM, Raman, and photoluminescence spectroscopy. XRD patterns show that asdeposited CdS films were polycrystalline. The grain size are increasing with increasing the Cd/S ratio and/or the deposition time. | VNU Journal of Science Mathematics - Physics 24 2008 119-123 Growth of CdS thin films by chemical bath deposition technique Be Xuan Hop Ha Van Trinh Khuc Quang Dat Phung Quoc Bao Department of Physics College of Sciences VNU 334 Nguyen Trai Thanh Xuan Hanoi Vietnam Received 29 April 2008 received in revised form 04 September 2008 Abstract. The structural morphological and optical properties of CBD deposited CdS thin films have been studied by varying the processing parameters and the Cd S ratio of the starting precursors in order to better understand the growth conditions. The films were characterized by X-ray diffraction SEM Raman and photoluminescence spectroscopy. XRD patterns show that as-deposited CdS films were polycrystalline. The grain size are increasing with increasing the Cd S ratio and or the deposition time. The fact that the symmetry-dependent Raman bands of the CdS thin films under investigation did not appear indicates the poor preferential orientation of as-deposited CdS crystallites which is in accordance with the measured XRD pattern. Keywords CdS thin film chemical bath deposition. 1. Introduction Chalcogenide semiconductor thin films are being intensively investigated for low-cost photovoltaic and optoelectronic applications 1 2 . Cadmium sulfide is commonly used as n-type semiconducting layer for heterojunction thin films solar cells. Multilayered CdS films can be employed in the manufacture of the optoelectronic devices. The deposition of CdS film has been explored by various techniques such as thermal evaporation 3 sputtering 4 molecular beam epitaxy 5 spray pyrolysis 6 chemical bath deposition 7 . Chemical bath deposition is a method of growing thin films of certain materials on a substrate immersed in an aqueous bath containing appropriate reagents at temperatures ranging from room temperature to 100 C. It has been identified as a low process suitable for the preparation of large area thin films 8 . In this study we report the preparation