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Tham khảo tài liệu 'measurement process characterization_15', kỹ thuật - công nghệ, điện - điện tử phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | 2.6.I.2. Analysis and interpretation Level-2 standard deviations ohm.cm for 5 wafers Run 1 Run 2 DF Average Wafer Stddev Probe DF Average Stddev 138. 2362. 95.0928 0.0359 5 95.1243 0.0453 5 139. 2362. 99.3060 0.0472 5 99.3098 0.0215 5 140. 2362. 96.0357 0.0273 5 96.0765 0.0276 5 141. 2362. 101.0602 0.0232 5 101.0790 0.0537 5 142. 2362. 94.2148 0.0274 5 94.2438 0.0370 5 2362. Pooled 0.0333 25 0.0388 25 over 2 runs 0.0362 50 Level-3 Level-3 standard deviations are computed from the averages of the two stability runs. Then the level-3 standard deviations are pooled over the five Stanford wafers to obtain a standard deviation with 5 degrees of freedom as deviations shown in the table below. computed from run averages and pooled over wafers http www.itl.nist.gov div898 handbook mpc section6 mpc612.htm 3 of 6 5 1 2006 10 13 13 AM 2.6.I.2. Analysis and interpretation Level-3 standard deviations ohm.cm for 5 wafers Wafer Stddev Probe DF Run 1 Average Run 2 Average Diff 138. 2362. 95.0928 95.1243 -0.0315 0.0223 1 139. 2362. 99.3060 99.3098 -0.0038 0.0027 1 140. 2362. 96.0357 96.0765 -0.0408 0.0289 1 141. 2362. 101.0602 101.0790 -0.0188 0.0133 1 142. 2362. 94.2148 94.2438 -0.0290 0.0205 1 2362. 0.0197 5 Pooled Graphs of A graphical analysis shows the relative biases among the 5 probes. For each probe wafer differences from the wafer average by probe are plotted versus wafer biases number. The graphs verify that probe 2362 coded as 5 is biased low relative to the other probes. The bias shows up more strongly after the probes have been in use run 2 . http www.itl.nist.gov div898 handbook mpc section6 mpc612.htm 4 of 6 5 1 2006 10 13 13 AM 2.6.I.2. Analysis and interpretation Formulas for computation of biases f for Biases by probe are shown in the following table. Differences Wafer 1 from Probe the mean Run 1 for each wafer Run 2 probe 2362 138. 1. 0.0248 -0.0119 138. 281. 0.0108 0.0323 138. 283. 0.0193 -0.0258 138. 2062. -0.0175 0.0561 138. 2362. -0.0372 -0.0507 139. 1. .
