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Tham khảo tài liệu 'engineering statistics handbook episode 4 part 7', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | 2.6.I.7. Dataplot macros ENGINEERING STATISTICS HANDBOOK HOME TOOLS Í AIDS ISEAtCH BACK Nfxf 2. Measurement Process Characterization 2.6. Case studies 2.6.1. Gauge study of resistivity probes 2.6.I.7. Dataplot macros Plot of wafer and day effect on repeatability standard deviations for run 1 reset data reset plot control reset i o dimension 500 30 label size 3 read mpc61.dat run wafer probe mo day op hum y sw yllabel ohm.cm title GAUGE STUDY lines blank all let z pattern 1 2 3 4 5 6 for I 1 1 300 let z2 wafer z 10 -0.25 characters a b c d e f X1LABEL WAFERS X2LABEL REPEATABILITY STANDARD DEVIATIONS BY WAFER AND DAY X3LABEL CODE FOR DAYS A B C D E F TITLE RUN 1 plot sw z2 day subset run 1 Plot of wafer and day effect on repeatability standard deviations for run 2 reset data reset plot control reset i o dimension 500 30 label size 3 read mpc61.dat run wafer probe mo day op hum y sw y1label ohm.cm title GAUGE STUDY lines blank all let z pattern 1 2 3 4 5 6 for I 1 1 300 let z2 wafer z 10 -0.25 characters a b c d e f X1LABEL WAFERS X2LABEL REPEATABILITY STANDARD DEVIATIONS BY WAFER AND DAY X3LABEL CODE FOR DAYS A B C D E F TITLE RUN 2 plot sw z2 day subset run 2 http www.itl.nist.gov div898 handbook mpc section6 mpc617.htm 1 of 4 5 1 2006 10 13 16 AM 2.6.I.7. Dataplot macros Plot of repeatability standard deviations for 5 probes - run 1 Plot of repeatability standard deviations for 5 probes - run 2 reset data reset plot control reset i o dimension 500 30 label size 3 read mpc61.dat run wafer probe mo day op hum y sw yllabel ohm.cm title GAUGE STUDY lines blank all let z pattern 1 2 3 4 5 6 for I 1 1 300 let z2 wafer z 10 -0.25 characters 1 2 3 4 5 X1LABEL WAFERS X2LABEL REPEATABILITY STANDARD DEVIATIONS BY WAFER AND PROBE X3LABEL CODE FOR PROBES 1 SRM1 2 281 3 283 4 2062 5 2362 TITLE RUN 1 plot sw z2 probe subset run 1 reset data reset plot control reset i o dimension 500 30 label size 3 read mpc61.dat run wafer probe mo day op hum y sw y1label ohm.cm title GAUGE STUDY
