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Tuyển tập báo cáo các nghiên cứu khoa học quốc tế ngành hóa học dành cho các bạn yêu hóa học tham khảo đề tài: Structural and optical properties of a radio frequency magnetron-sputtered ZnO thin film with different growth angles | Ko et al. Nanoscale Research Letters 2012 7 55 http www.nanoscalereslett.eom content 7 1 55 o Nanoscale Research Letters a SpringerOpen Journal NANO EXPRESS Open Access Structural and optical properties of a radio frequency magnetron-sputtered ZnO thin film with different growth angles 1 1 1 2 3 4 Ki-Han Ko Yeun-Ho Joung Won Seok Choi Mungi Park Jaehyung Lee and Hyun-Suk Hwang Abstract This study introduces optical properties of a columnar structured zinc oxide ZnO antireflection coating for solar cells. We obtained ZnO films of columnar structure on glass substrates using a specially designed radio frequency magnetron sputtering system with different growth angles. Field-emission scanning electron microscopy was utilized to check the growth angles of the ZnO films which were controlled at 0 15 and 30 . The film thickness was fixed at 100 nm to get a constant experiment condition. Grain sizes of the ZnO films were measured by X-ray diffraction. A UV-visible spectrometer was used to measure the transmittance and reflectance of the ZnO film columnar structures as a function of the growth angles. Keywords ZnO film growth angle antireflection coating RF magnetron sputtering solar cell Introduction To achieve a high efficient solar cell one of the most important processes is antireflection coating ARC which also has a function of passivation 1 . ARCs generally reduce the reflection of sunlight and increase the intensity of radiation on the inside of solar cells. With the antireflection layer Choi et al. 2 demonstrated that solar cell efficiency can be increased by around 10 . In general the refractive index of a thin film is variable according to the kind of material and thickness of the films. It is addressed that a medium refractive index material between air n 1 and Si n 3.4 is optimal for the ARC 1 . However with glass-based solar cells such as dye-sensitized and thin film solar cells it is hard to get a good antireflection effect due to a low refractive index of .
