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Precision measurement of structures in the micrometer and sub-micrometer ranges is becoming more and more important. Because of the never-ending miniaturization it is central to the precision of production and metrology of microelectronics and micromechanics, but also to the measurement of the size distribution of microparticles, for example, in environmental protection. A number of measuring methods are available to perform these tasks. | 98 I 3 Sensors for Workpieces 3.1.7 Further Reading Sensors in Manufacturing. Edited by H.K. Tbnshoff I. Inasaki Copyright 2001 Wiley-VCH Verlag GmbH ISBNs 3-527-29558-5 Hardcover 3-527-60002-7 Electronic 1 Adam w. Busch M. Nickolay B. Sensoren für die Produktionstechnik Berlin Springer 1997. 2 Deutsche Gesellschaft für Zerstörungsfreie Prüfung Handbuch OF 1 Verfahren für die Optische Formerfassung Eigenverlag 1995. 3 Dutschke W. Fertigungsmeßtechnik Stuttgart Teubner 1993. 4 Ernst A. Digitale Längen- und Winkelmesstechnik Landsberg Lech Verlag Moderne Industrie 1989. 5 Gasvik K.J. Optical Metrology Chichester J. Wiley 1995. 6 Gevatter H.-J. Handbuch der Mess- und Automatisierungstechnik Berlin Springer 1999. 7 Lemke E. Fertigungsmeßtechnik Braunschweig Vieweg 1992. 8 Pfeifer T. Fertigungsmeßtechnik Munich Oldenbourg 1998. 9 Schlemmer H. Grundlagen der Sensorik Heidelberg Wichmann 1996. 3.2 Micro-geometric Features A. Weckenmann Universität Erlangen-Nürnberg Erlangen Germany Precision measurement of structures in the micrometer and sub-micrometer ranges is becoming more and more important. Because of the never-ending miniaturization it is central to the precision of production and metrology of microelectronics and micromechanics but also to the measurement of the size distribution of microparticles for example in environmental protection. A number of measuring methods are available to perform these tasks. They range from conventional optical microscopy and its extension into the ultraviolet range through electron microscopy to the high-resolution near-field microscopy methods such as atomic force microscopy. Optical microscopy includes conventional bright- and dark-field microscopy confocal scanning microscopy in the visible and ultraviolet spectral ranges and interference microscopy. As a non-microscopic additional feature far-field diffraction images of the objects are evaluated. Fundamental research into the interaction of the radiation used with the objects and
