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This paper describes design and calculation of an electrothermal V-shaped actuator (EVA) and an amplification mechanism integrated into a force measuring microsystem (FMMS), aims to apply for characterization of a micro beam. Displacement and driving force are generated by thermal expansion of the V-shaped silicon beams while applying a voltage to the electrodes of the EVA. ANSYS simulation helps to find out the relations between thermal force and displacement corresponding to driving voltage and determine the temperature of V-shaped beam at various applying voltages. |