TAILIEUCHUNG - MEMS display

This paper summarizes the results from our previously published researches on reflective and transmissive optical switches for MEMS integrated display systems | Micro-optical Components for a MEMS Integrated Display Kerwin Wanga Khye-Suian Weia Mike Sinclairb and Karl F. Bohringera Electrical Engineering Department University of Washington Seattle WA 98195 USA Hardware Devices Group Microsoft Research Redmond WA 98052 USA kerwin@ This paper summarizes the results from our previously published researches on reflective and transmissive optical switches for MEMS integrated display systems. They include a dual-servoscanning mirror and a transmissive zigzag electrostatic micro-optical switch. It also introduces a new process for making a microlens array. These are three key components for a MEMS display system. I. Introduction Today Cathode Ray Tube CRT and Liquid Crystal Display LCD are the two mainstream display technologies. Plasma display panels PDP are thinner than CRT displays and brighter than LCD with good contrast ratio contributing to the rapid growth in the wall display market. However each display technology can address only a limited market segment according to its characteristic advantages and limitations. Microelectro-mechanical display systems are attracting a lot of attention because of their potentially low power consumption higher contrast ratio and cost effectiveness 1 . Several optical MEMS based display technologies have been proposed such as DLP 2 GLV 3 IMod 4 Gyricon 5 and LCOS 6 . Among these technologies the major challenge in commercialization of MEMS displays is the cost of the production and packaging. Thus the next generation of MEMS displays must include key components developed for the improvement of device performance and the reduction of manufacturing costs. This paper summarizes the results from our previous published papers on reflective 7 and transmissive 8 optical switches as well as microlens arrays for MEMS integrated display systems. They are three key components for MEMS including 1 a dual-servo-scanning mirror which makes use of thermal and electrostatic driving .

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