TAILIEUCHUNG - Nanoscale Calibration Standards and Methods Edited by G. Wilkening, L. Koenders

An overview of PTB’s activities in the field of dimensional nanometrology using scanning probe microscopes (SPMs) is presented. The chapter is divided into two parts: the development of (1) high-resolution probing systems and (2) complete SPM metrology systems. The subject of SPM-probing system design comprises, among other things, the concept of the “sensor objective” to combine conventional microscopy with scanning probe techniques. | Nanoscale Calibration Standards and Methods Edited by G. Wilkening L. Koenders Nanoscale Calibration Standards and Methods Dimensional and Related Measurements in the Micro- and Nanometer Range. Edited by Gunter Wilkening Ludger Koenders Copyright 2005 Wiley-VCH Verlag GmbH Co. KGaA Weinheim ISBN 3-527-40502-X Nanoscale Calibration Standards and Methods Dimensional and Related Measurements in the Micro- and Nanometer Range Edited by Cunter Wilkening Ludger Koenders WILEY-VCH WILEY-VCH Verlag GmbH Co. KGaA Editors Prof. Dr. Gunter Wilkening National Metrology Institute PTB Nano- und Micrometrology Department Dr. Ludger Koenders National Metrology Institute PTB Nano- und Micrometrology Department Cover Picture Illustration Hans-Ulrich Danzebrink All books published by Wiley-VCH are care fully produced. Nevertheless authors editors and publisher do not warrant the information contained in these books including this book to be free of errors. Readers are advised to keep in mind that statements data illustrations procedural details or other items may inadvertently be inaccurate. Library of Congress Card No. Applied for British Library Cataloguing-in-Publication Data A catalogue record for this book is available from the British Library. Bibliographic information published by Die Deutsche Bibliothek Die Deutsche Bibliothek lists this publication in the Deutsche Nationalbibliografie detailed bibliographic data is available in the Internet at http . 2005 WILEY-VCH Verlag GmbH Co. KGaA Weinheim All rights reserved including those of translation into other languages . No part of this book may be reproduced in any form - by photoprinting microfilm or any other means - nor transmitted or translated into a machine language without written permission from the publishers. Registered names trademarks etc. used in this book even when not specifically marked as such are not to be considered unprotected by law. Composition .

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