TAILIEUCHUNG - Bio-MEMS Technologies and Applications - Wang and Soper (Eds) Part 4

Tham khảo tài liệu 'bio-mems technologies and applications - wang and soper (eds) part 4', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | The LIGA Process 83 Key advantages of LIGA-made microstructures are the inherent precision and the ability to cover lateral dimensions from submicrometer to millimeter sizes. These features make LIGA microstructures valuable for integrating assembly and packaging features into MEMS devices and drastically minimizing the overall packaging effort a huge cost factor in MEMS devices. The molding process especially can be flexibly combined for example with Si-based microelectronics on the batch wafer level further improving system integration and high-yield production and reducing overall device assembly efforts. Research in LIGA is an ongoing active field and a number of new ideas combined with novel materials prove that LIGA technologies still spark the interest and excitement of the research community. These efforts are often driven by concrete requirements for new MEMS applications from industrial partners. A remaining challenge for LIGA is the lack of standardized processes demanding reevaluation and optimization of process details for nearly every new microstructure. This also slows down the transition into commercial manufacturing. In conclusion LIGA technology has matured to the point that commercial applications have become possible and are being pursued. Applications including bio-MEMS and microfluidics have moderate structure requirements but need cost-effective production and dedicated materials to meet market demands. A number of alternative microfabrication technologies including precision micromachining and micro-EDM are employed for mold insert fabrication and molding becomes the manufacturing technology of choice for the microparts. A direct-LIGA approach combining x-ray lithography and electroplating is used for applications for microstructures with extreme precision and very high aspect ratios. Prototype fabrication of these structures can be satisfied but scaling-up production with high yield and high quality remains a challenge for the future. .

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