TAILIEUCHUNG - Optoelectronics Devices and Applications Part 11

Tham khảo tài liệu 'optoelectronics devices and applications part 11', kỹ thuật - công nghệ, cơ khí - chế tạo máy phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | Integrated ASIC System and CMOS-MEMS Thermally Actuated Optoelectronic Switch Array for Communication Network 389 Fig. 4. Simulated fundamental mode profile from BPM-based calculations. In the process of making the rib waveguide as shown in Table 2 we also examined four different process parameters to see how they affect the final waveguide s dimensions. The first step was to investigate the polarization characteristics of the waveguide due to its geometry. Various waveguide heights ranging from to and width ranging from to are considered. While keeping waveguide height constant during the computation the difference in effective indices of the fundamental TE waveguide modes has been evaluated as the etch depth and waveguide width were varied. Process number Process step 1 Thermally grown SiO2 on Si wafer 2 LPCVD deposition of Si3N4 layer 3 Spinning of resist patterned by photolithography E-Beam and structure by RIE 4 Deposition of PECVD SiO2 cladding layer and annealing of layer stack 5 Sputtering a Platinum Pt thin film 6 Patterned by photolithography and Pt wet-etch. Table 2. Process flow for SiO2 Si3N4 coupled microring resonators. 390 Optoelectronics - Devices and Applications Single mode propagation is an important requirement for optical waveguide devices for use with single-mode fiber it can reduce the coupling loss. In this research a technique is used for calculating the field distribution of the Si3N4 rib waveguide. The waveguide was modeled using the three-dimensional full-vectorial beam propagation method BPM to calculate the effective refractive indices and modal field profiles for various waveguide widths heights and etch depths. The scanning electron micrograph SEM of Fig. 5 shows such a fabricated rib waveguide. We experimentally verify the practically single mode nature of our deeply etched rib waveguides by imaging control straight waveguides output intensity patterns. shows the representative imaged waveguide output .

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