TAILIEUCHUNG - Measurement Process Characterization_17

Tham khảo tài liệu 'measurement process characterization_17', kỹ thuật - công nghệ, điện - điện tử phục vụ nhu cầu học tập, nghiên cứu và làm việc hiệu quả | . Difference between 2 wiring configurations ENGINEERING STATISTICS HANDBOOK home TOOLS s aids search back next- 2. Measurement Process Characterization . Case studies . Evaluation of type A uncertainty . Analysis and interpretation . Difference between 2 wiring configurations Measurements with the probe configured in two ways The graphs below are constructed from resistivity measurements on five wafers where the probe 2362 was wired in two different configurations A and B. The probe is a 4-point probe with many possible wiring configurations. For this experiment only two configurations were tested as a means of identifying large discrepancies. Artifacts for the study The five wafers namely 138 139 140 141 and 142 are coded 1 2 3 4 5 respectively in the graphs. These wafers were chosen at random from a batch of approximately 100 wafers that were being certified for resistivity. Interpretation Differences between measurements in configurations A and B made on the same day are plotted over six days for each wafer. The two graphs represent two runs separated by approximately two months time. The dotted line in the center is the zero line. The pattern of data points scatters fairly randomly above and below the zero line -- indicating no difference between configurations for probe 2362. The conclusion applies to probe 2362 and cannot be extended to all probes of this type. http div898 handbook mpc section6 1 of 3 5 1 2006 10 13 28 AM . Difference between 2 wiring configurations http div898 handbook mpc section6 2 of 3 5 1 2006 10 13 28 AM . Difference between 2 wiring configurations http div898 handbook mpc section6 3 of 3 5 1 2006 10 13 28 AM

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