TAILIEUCHUNG - Nano and Microelectromechanical Systems P2

A large variety of nano- and microscale structures and devices, as well as NEMS and MEMS (systems integrate structures, devices, and subsystems), have been widely used, and a worldwide market for NEMS and MEMS and their applications will be drastically increased in the near future. The differences in NEMS and MEMS are emphasized, and NEMS are smaller than MEMS. For example, carbon nanotubes (nanostructure) can be used as the molecular wires and sensors in MEMS. Different specifications are imposed on NEMS and MEMS depending upon their applications. For example, using carbon nanotubes as the molecular wires, the current density. | CHAPTER 2 MATHEMATICAL MODELS AND DESIGN OF NANO- AND MICROELECTROMECHANICAL SYSTEMS . NANO- AND MICROELECTROMECHANICAL SYSTEMS ARCHITECTURE A large variety of nano- and microscale structures and devices as well as NEMS and MEMS systems integrate structures devices and subsystems have been widely used and a worldwide market for NEMS and MEMS and their applications will be drastically increased in the near future. The differences in NEMS and MEMS are emphasized and NEMS are smaller than MEMS. For example carbon nanotubes nanostructure can be used as the molecular wires and sensors in MEMS. Different specifications are imposed on NEMS and MEMS depending upon their applications. For example using carbon nanotubes as the molecular wires the current density is defined by the media properties . resistivity and thermal conductivity . It is evident that the maximum current is defined by the diameter and the number of layers of the carbon nanotube. Different molecular-scale nanotechnologies are applied to manufacture NEMS controlling and changing the properties of nanostructures while analog discrete and hybrid MEMS have been mainly manufactured using surface micro-machining silicon-based technology lithographic processes are used to fabricate CMOS ICs . To deploy and commercialize NEMS and MEMS a spectrum of problems must be solved and a portfolio of software design tools needs to be developed using a multidisciplinary concept. In recent years much attention has been given to MEMS fabrication and manufacturing structural design and optimization of actuators and sensors modeling analysis and optimization. It is evident that NEMS and MEMS can be studied with different level of detail and comprehensiveness and different application-specific architectures should be synthesized and optimized. The majority of research papers study either nano- and microscale actuators-sensors or ICs that can be the subsystems of NEMS and MEMS. A great number of publications have been .

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