TAILIEUCHUNG - Effect of strain on impurity diffusion in silicon

The effects of strain on the diffusion of impurities in silicon crystal are investigated using the statistical moment method (SMM). The influence of tensile strain on diffusion coefficient D is characterized by relaxation volume V r and migration volume V m. The numerical results for B and P diffusion in silicon that are performed and compared to experimental data show good agreement. | JOURNAL OF SCIENCE OF HNUE Mathematical and Physical Sci. 2012 Vol. 57 No. 7 pp. 71-78 This paper is available online at http EFFECT OF STRAIN ON IMPURITY DIFFUSION IN SILICON Vu Van Hung1 and Phan Thi Thanh Hong2 1 Faculty of Physics Hanoi National University of Education 2 Faculty of Physics Hanoi University of Education Abstract. The effects of strain on the diffusion of impurities in silicon crystal are investigated using the statistical moment method SMM . The influence of tensile strain on diffusion coefficient D is characterized by relaxation volume V r and migration volume V m . The numerical results for B and P diffusion in silicon that are performed and compared to experimental data show good agreement. Keywords Diffusion coefficient tensile strain relaxation volume migration volume moment method. 1. Introduction When a material body is deformed it s shape and size are transformed the crystal lattice will undergo constant change and properties of the system such as thermal electrical and magnetic properties will be changed. In particular the deformation of an object will greatly effect the diffusion of atoms in the system. In recent years the effect of strain on the diffusion coefficient has attracted the attention of both theoretical and experimental scientists. Among other things they are looking at the diffusion of normal impurities such as B P As Sb in Si or SiGe alloy. A series of experimental observations and theoretical calculations performed by Aziz 1 Christensen 2 Johansson 3 and Dunham 4 indicate that the diffusion of B and P in silicon mediated by an interstitialcy mechanism and their diffusion coefficients increase with tensile strain and decrease with compression strain. And within the same range of temperatures the slope of the diffusion-strain curves is also different. Thus the diffusion of impurities in Si under the influence of strain is a problem that bears looking into. Received October 15 2011. Accepted September

• Toán học
• Diffusion coefficient
• Tensile strain
• Relaxation volume
• Migration volume
• Moment method
• Mathematical and physical
• Riesz Feller space fractional backward diffusion problem
• A time dependent coefficient
• Space fractional diffusion equation
• The Riesz Feller derivative
• Space fractional backward diffusion problem
• Ill posed problem
• BMC Cancer
• Diffusion weighted magnetic resonance imaging
• Stomach neoplasm
• Whole lesion apparent diffusion coefficient
• Multiple tumors
• Apparent diffusion coefficient value
• Nasopharyngeal carcinoma
• Diffusion weighted magnetic resonance imaging
• Overall survival
• Breast cancer
• Apparent Diffusion Coefficient
• Distinguishing malignant
• Methodological quality
• Bài báo khoa học
• Bài viết nghiên cứu khoa học
• Water vapor
• Mass diffusion coefficient
• Velocity changing collisions
• Sparsity regularization
• Energy functional
• Diffusion coefficient identification problem
• Gradient type algorithm
• Nesterov’s accelerated algorithm
• Beck’s accelerated algorithms
• Water diffusion coefficients
• Chickpeas Cicer arietinum
• Green pul
• Gravimetric method
• Vacancy bubbles
• Amorphous alloy
• Diffusion mechanism
• Calculated results
• Gibbs free energy
• Self diffusion
• Vibrational anharmonicity effect
• Activation energy
• BMC Musculoskeletal Disorders
• Magnetic resonance imaging
• Diffusion tensor imaging
• Fractional anisotropy
• T2 mapping
• Knee joint
• Diffusion weighted imaging
• Locoregionally advanced nasopharyngeal carcinoma
• Apparent diffusion coefficient
• Distant metastasis free survival
• Molecular weights
• Diffusion ordered NMR spectroscopy
• Polystyrene molecular weight
• Nuclear magnetic resonance
• Gastrointestinal stromal tumor
• Response evaluation
• Targeted therapy
• Cervical cancer
• Disease free survival
• Local regional control
• binary interstitial alloy
• Jumping frequency
• Effective jumping length
• Correlation factor
• Activated energy
• Statistical moment method
• Interstitial alloy
• Correlation factor
• Locally advanced cervical cancer
• Target volume
• Diffusion weighted MRI
• Multicomponent SystemRelative Permeability
• Porous Media
• Capillary Pressure Curve
• Drying effect
• Polymer modified cement
• Patch repaired mortar
• Constraint stress
• Moisture diffusion coefficient
• Real environmental boundary conditions
• Experimental study on properties
• Polymer modified cement mortars
• Silica fume
• Effective diffusion coefficient
• Higher microhardness value
• Intermolecular potential
• CH4–inert gases
• CH4–inert gas mixtures
• Scattering cross section data
• Cow urine distillate
• Phenol coefficient
• Agar well diffusion test
• Antimicrobial properties
• Five commercially available
• Textural features
• Radiopeptide therapy
• Neuroendocrine tumors
• Positron emission tomography