TAILIEUCHUNG - Study of mos structures using nuclear analytical methods

The atomic concentrations and depth distribution of elements in MOS (metal oxide semiconductor) structures have been investigated using two nuclear analytical methods: Rutherford Backscattering Spectrometry (RBS) and Elastic Recoil Detection (ERD). The elements with atomic masses in range from hydrogen up to copper were identified. Their depth profiles show that a MOS structure consists of metal (Al) layer, silicon oxide layer and a silicon substrate. | Communications in Physics, Vol. 27, No. 4 (2017), pp. 279-289 DOI: STUDY OF MOS STRUCTURES USING NUCLEAR ANALYTICAL METHODS TRAN VAN PHUCa,† , M. KULIKb,c , A. P. KOBZEVb , LE HONG KHIEMa a Institute of Physics, 10 Dao Tan, Ba Dinh, Hanoi, Vietnam b Frank Laboratory of Neutron Physics, Joint Institute for Nuclear Research, 141980 Dubna, Russia c Institute of Physics, Maria Curie-Skodowska University, pl. M. Curie-Skodowskiej 1, 20-031 Lublin, Poland † E-mail: tvphuc@ Received 19 October 2017 Accepted for publication 16 November 2017 Published 22 December 2017 Abstract. The atomic concentrations and depth distribution of elements in MOS (metal oxide semiconductor) structures have been investigated using two nuclear analytical methods: Rutherford Backscattering Spectrometry (RBS) and Elastic Recoil Detection (ERD). The elements with atomic masses in range from hydrogen up to copper were identified. Their depth profiles show that a MOS structure consists of metal (Al) layer, silicon oxide layer and a silicon substrate. The heavy elements Cu, Ti were found at near-surface area of one sample with low concentrations. The transitional area between the silicon substrate and the oxide layer as well as between the metal and oxide layers was noticed. The obtained results provide valuable information about MOS structures and concurrently demonstrate the possibilities of both RBS and ERD methods in material analysis. Keywords: Rutherford backscattering spectrometry, elastic recoil detection, multilayer structures. Classification numbers: ; ; c 2017 Vietnam Academy of Science and Technology 280 STUDY OF MOS STRUCTURES USING NUCLEAR ANALYTICAL METHODS I. INTRODUCTION The RBS and ERD are the nuclear analytical methods that can be used to determine the elemental composition, atomic concentration, depth distribution of elements contained in near surface area of investigated samples. With the development

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